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Semiconductor Epitaxy UPS Case: BKPOWER Ensures 98.5% Wafer Yield

Ⅰ. Project Overview

  1. Enterprise Background
    • Founded in 2016, headquartered in Pizhou Economic Development Zone, Jiangsu, Jiangsu Huaxing Laser is a national high-tech and specialized “Little Giant” enterprise.
    • Focuses on R&D and production of Ⅲ-Ⅴ compound semiconductor epitaxial wafers (GaAs, InP), serving high-end fields like optical fiber communication and laser radar.
    • Features: 30+ PhD/MA core team, ¥200M+ equipment value, 5,000㎡ clean workshop, ¥150M+ annual output.
  2. Production Line Power Demands
    • MOCVD equipment for semiconductor epitaxy requires:
      • Voltage stability within ±1% (fluctuations reduce wafer yield).
      • Harmonic filtering for distortion rates >5% from high-frequency devices.
Semiconductor Epitaxy UPS Case

Ⅱ. Core Challenges

  1. Power Quality Risks
    • Instantaneous overload: MOCVD startup current peaks at 8,000A, triggering overload protection in traditional UPS.
    • Harmonic pollution: THDi reaches 8% from non-linear loads, shortening equipment lifespan.
  2. Harsh Environmental Demands
    • Equipment shutdown >10 minutes scraps wafers, requiring seamless UPS switching.
  3. O&M Management Hurdles
    • Decentralized supply: 12 independent UPS systems caused >30-minute fault response.
    • Battery aging: Lead-acid batteries (3,000 cycles) incurred ¥500K annual replacement costs.
Semiconductor Epitaxy UPS Case

Ⅲ. Solution

  1. Technical Architecture
    • Intelligent Parallel Control:
      • 4×300kVA UPS in parallel (1.2MW total), N+1 redundancy, ±1% load balancing.
    • Harmonic Governance:
      • Built-in THDi active filtering, input PF >0.99.
  2. Implementation Strategy
    • Modular deployment with 30% capacity reserve.
    • Integration with factory MES for real-time UPS efficiency and battery SOH monitoring.

Ⅳ. Project Achievements

  1. Production Stability Gains
    • 98% reduction in MOCVD shutdowns, wafer yield up from 92% to 98.5%.
  2. Energy Efficiency Optimization
    • THDi reduced from 8% to 3%, saving ¥800K/year in electricity.
    • Lithium iron phosphate batteries (10,000 cycles) cut maintenance costs by 70%.